852 Vertical-Cavity Surface-Emitting Laser Bare Chips 0.1-70 

Single-mode VCSEL chip Atomic optical instruments have established the status of high-precision estimation in many measurement fields, such as atomic frequency standard, atomic magnetometer, and atomic inertial system given the progress of atomic optical technology. In recent years, researchers have developed chip-level atomic sensors, further developed them to the direction of low-power consumption and miniaturization, and expanded the application of atomic optical devices in aerospace, national defense, and civil fields. The development of chip-level atomic sensor devices mainly benefits from two core technologies: micro semiconductor laser technology represented by vertical cavity surface emitting laser and micro fabrication technology of atomic sensor based on MEMS technology. Vertical-cavity surface emitting lasers (VCSELs) have narrow linewidth, low power consumption, modulability, and single-mode and single-polarization…